Affiliations: [a] Ganzhou People's Hospital, Ganzhou, Jiangxi, China | [b] The First Hospital of Jilin University, Changchun, Jilin, China | [c] Department of Computer, Communication University of China, Beijing, China | [d] School of Mechanical Engineering, Xinjiang University, Urumqi, Xinjiang, China
Abstract: Positioning stage with high resolution and high stiffness
are always required in the micro/nano manipulation. This paper presents the
design, fabrication and experimental tests of a piezo-driven positioning
stage based on the inchworm principle, which can provide a large motion
range with high resolution and high stiffness. The positioning stage mainly
consists of a monolithic compliant mechanism and four piezoelectric
actuators, which form one linear driving unit and two clamping units with
complementary structures. Two piezoelectric actuators connected in parallel
are utilized to drive the linear moving section for high stiffness. To
facilitate the parameter design, the analytical models are derived in detail
and validated by finite element analysis. A prototype of the positioning
stage is designed, fabricated and tested to further demonstrate the
feasibility of the proposed idea. Experimental results well verify the
effectiveness of the developed design.
