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Issue title: Selected papers from the 12th International Workshop on Optimization and Inverse Problems in Electromagnetism (OIPE 2012)
Guest editors: Luc Dupré and Guillaume Crevecoeur
Article type: Research Article
Authors: Chereches, R.a; b; * | Di Barba, P.b | Topa, V.a | Purcar, M.a | Wiak, S.c
Affiliations: [a] Department of Electrotechnics and Measurements, Technical University of Cluj-Napoca, Cluj-Napoca, Romania | [b] Department of Industrial and Information Engineering, University of Pavia, Pavia, Italy | [c] Faculty of Electrical, Electronic, Computer and Control Engineering Łódź University of Technology, Łódź, Poland
Correspondence: [*] Corresponding author: R. Chereches, Department of Electrotechnics and Measurements, Technical University of Cluj-Napoca, RO-400027, Cluj-Napoca, Romania. E-mail: robert.chereches@ethm.utcluj.ro
Abstract: A procedure of automated optimal design of a class of micro-electromechanical devices is proposed in terms of a multiobjective optimization formulation. A comb-drive electrostatic accelerometer is considered as the case study. By optimizing the shape design of the device, it is desired to extend the actuation range of the comb drive in steady-state conditions, leading to greater gap distances between the electrodes. The design variables control the geometry of fixed and movable electrodes, in terms of width and height. The twofold goal of maximizing the drive force considered as the main criterion, while minimizing the levitation force considered as a parasitic effect, makes it possible to implement a Pareto optimality approach.
Keywords: Multiobjective optimization, finite-element analysis, electric field, MEMS
DOI: 10.3233/JAE-131710
Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 43, no. 1-2, pp. 65-76, 2013
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