Design and fabrication of a microactuator for a hearing aid

Issue title: Selected Papers from the 15th International Symposium on Applied Electromagnetics and Mechanics (ISEM 2011)

Article type: Research Article

Authors: Creutzburg, Tom^{a; *} | Rissing, Lutz^a | Lenarz, Thomas^b | Reuter, Günter^b

Affiliations: [a] Institute for Micro Production Technology, Leibniz Universität Hannover, Garbsen, Germany | [b] Department of Otolaryngology, Hannover Medical School, Hannover, Germany

Correspondence: [*] Corresponding author: Tom Creutzburg, Institute for Micro Production Technology, Leibniz Universität Hannover, An der Universität 2, 30823, Garbsen, Germany. E-mail: creutzburg@impt.uni-hannover.de

Abstract: In order to design an electromagnetically driven microsystem serving as an ear implant to overcome amblyacousia, Finite Element Method (FEM) simulations were conducted. The system consists of three parts, an upper system part, a lower system part and a plunger. The design process included mechanical, electromagnetic, and thermal simulations. Based on the simulations a system layout was derived and the microactuator was fabricated on the basis of micro system technology processes in batch fabrication. The assembly of the system was performed on system level.

Keywords: Microactuator, hearing aid, MEMS, FEM simulation

DOI: 10.3233/JAE-2012-1498

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 39, no. 1-4, pp. 471-477, 2012