Position control of a dual-stage actuator

Issue title: Selected Papers from the 14th International Symposium on Applied Electromagnetics and Mechanics (ISEM 2009), Part I

Article type: Research Article

Authors: Sasaki, Minoru^{a; *} | Ozeki, Tomohito^a | Ito, Satoshi^a | Tamagawa, Hirohisa^a

Affiliations: [a] Department of Human and Information Systems, Faculty of Engineering, Gifu University, 1-1 Yanagido, Gifu, 501-1193, Japan

Correspondence: [*] Corresponding author. Tel.: +81 58 293 2541; Fax: +81 293 2541; E-mail: Sasaki@gifu-u.ac.jp

Abstract: This paper describes the position control of a dual-stage actuator with piezoelectric actuator using self-sensing actuation. The dual-stage servo system consists of a coarse actuator and a fine actuator. A DC servo motor is used as the coarse actuator, and a piezoelectric actuator provides fine control. The position control of the dual-stage actuator using the dual feedback method and self-sensing is presented. Experimental results show the validity of the proposed control system

Keywords: Dual-stage actuator, position control, piezoelectric actuator, self-sensings

DOI: 10.3233/JAE-2010-1193

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 33, no. 1-2, pp. 839-847, 2010