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Article type: Research Article
Authors: Erko, A. I.
Affiliations: Institute of Microelectronics Technology and High Purity Materials, USSR Academy of Sciences, 142432 Chernogolovka, Moscow District, USSR
DOI: 10.3233/XST-1990-2405
Journal: Journal of X-Ray Science and Technology, vol. 2, no. 4, pp. 297-316, 1990
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