X-Ray Focusing Optics and Its Applications in XRMF and XRL

Article type: Research Article

Authors: Yan, Yiming | Ding, Xunliang | Wang, Dachun | Liu, Andong | Zhang, Shengji | He, Yejun | Chen, Baozhen | Wei, Fuzhong | Liang, Wei | Chen, Jun | Liu, Yicheng

Affiliations: Institute of Low Energy Nuclear Physics, Beijing Radiation Center, Beijing Normal University, Beijing 100875, China

Abstract: A brief review of the research on capillary x-ray focusing optics (the x-ray lens) at the X-Ray Optics Laboratory of the Institute of Low Energy Nuclear Physics at Beijing Normal University is presented. As a new tool for controlling powerful wide-bandwidth x-ray beams, the x-ray lens has very broad applications in both pure and applied sciences and in industry. Research toward developing such optics continues to grow in Russia, United States, and China. Some applications of x-ray lenses have also been developed. The preliminary results of theoretical and experimental studies on applications of x-ray lenses in x-ray microfluorescence and deep submicron lithography are quite encouraging. These achievements anticipate the appearance of a new generation of x-ray equipment.

DOI: 10.3233/XST-1997-7101

Journal: Journal of X-Ray Science and Technology, vol. 7, no. 1, pp. 1-11, 1997