X-Ray Study of State-of-the-Art Small (d-Spacing W/B₄C Multilayers

Article type: Research Article

Authors: Christensen, F. E. | Shou-Hua, Zhu | Hornstrup, A. | Schnopper, H. W. | Plag, P. | Wood, J.

Affiliations: Ovonic Synthetic Materials Company, Michigan

Note: [] Permanent address: Institute of Control Engineering, Beijing, China.

Abstract: Two small d-spacing W/B4C multilayers have been studied at three different x-ray energies CuKα1, AlKα, and FeLα. Measurements of total reflection, specular and mosaic Bragg reflection, and high resolution studies were made at Cu Kα1. Multilayer parameters are deduced from the data and the perfection of the multilayer structure is evaluated by Comparison with model Calculations.

DOI: 10.3233/XST-1991-3101

Journal: Journal of X-Ray Science and Technology, vol. 3, no. 1, pp. 1-13, 1991