Absolute zone plate efficiency measurement using laboratory X-ray sources

Article type: Research Article

Authors: Chen, Sharon | Lyon, Alan | Kirz, Janos^; | Seshadri, Srivatsan | Feng, Yan | Feser, Michael | Sassolini, Simone | Duewer, Fred | Zeng, Xianghui | Huang, Carson

Affiliations: Xradia Inc., 4075A Sprig Drive, Concord, CA, USA | Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA, USA

Note: [] Corresponding author. Sharon Chen, 4075A Sprig Drive, Concord, CA 94520, USA. Tel.: +1 925 288 1225 ext 2129; Fax: +1 925 288 1299; E-mail: schen@xradia.com

Abstract: An absolute efficiency measurement technique for Fresnel zone plates using an electron impact micro-focus laboratory X-ray source (Lα line of Tungsten at 8.4 KeV) is demonstrated. A quasi-monochromatic x-ray image of a zone plate was obtained employing a pair of copper and cobalt filters. Applying the method to a gold zone plate with 70 nm outermost zone width, 160 μm diameter, and 660 nm zone height, the absolute first order efficiency was measured to be 8.7% ± 0.6%, which is 73% of the theoretically calculated value.

Keywords: Zone plate, Fresnel zone plate, efficiency, absolute efficiency, laboratory X-ray, filter, X-ray microscopy

Journal: Journal of X-Ray Science and Technology, vol. 16, no. 4, pp. 235-241, 2008