Study on photothermal vibration response of gold coating semiconducting microcantilevers

Article type: Research Article

Authors: Song, Yaqin^a; | Yang, Xiaogang^a | Dong, Tianbao^b

Affiliations: [a] State Key Laboratory of Strength and Vibration for Mechanical Structures, School of Aerospace, Xi’an Jiaotong University, Xi’an, P.R. China | [b] Energetic Materials Measurement and Evaluation Center of CAEP, Mianyang, P.R. China

Correspondence: [*] Corresponding author: Yaqin Song, School of Aerospace Engineering, Xi'an Jiaotong University, P.R. China. E-mail: yqsong@mail.xjtu.edu.cn

Abstract: The elastic vibration response of coat layered semiconducting microcantilevers, which were excited with a frequency-modulated pump laser and detected with another probe beam, was studied experimentally and theoretically in this paper. The photothermal vibration frequency spectra were measured and analyzed for a set of microcantilevers with different coating thickness at the region near the first resonant frequency. Also the vibrations of microcantilevers were calculated using coupled carrier dispersion, thermal wave and elastic wave equations. The results showed that the experimental results had a good agreement with the theoretical ones.

Keywords: Photothermal, vibration, coating, microcantilevers

DOI: 10.3233/JAE-171093

Journal: International Journal of Applied Electromagnetics and Mechanics, vol. 59, no. 2, pp. 391-397, 2019