Abstract: For a non-contact piezoelectric motor modulated by electromagnetic field, the equation of the free vibration for the driving system of the motor is given. Using the boundary conditions and continuity conditions, the natural frequencies and mode functions of the driving system are obtained. The variation law of the natural frequency is investigated, when the system parameters of the driving system are changed in a certain range. The results show that the change of the system parameters of piezoelectric stacks and driving beams has obvious effects on odd order natural frequencies of the driving system; the change of the system parameters of the center shaft have obvious effects on even order natural frequencies; In the odd order modes, the maximum vibration amplitude of the driving system occurs at the junction of the driving beam and the center shaft. It is conducive to output of the motor rotation angle. All the results are useful for design and control of operating performance of the motor.
Keywords: Free vibration, non-contact, modulated by electromagnetic field, natural frequency, mode function
