Affiliations: [a] State Key Laboratory of Explosion Science and
Technology, Beijing Institute of Technology, Beijing, China | [b] Key Laboratory for Precision and Non-traditional
Machining Technology of the Ministry of Education, Dalian University of
Technology, Dalian, Liaoning, China
Correspondence:
[*]
Corresponding author: Ping Li, Room. 109, Teaching Building
3#, School of Mechatronical Engineering, Beijing Institute of Technology,
Haidian District, Beijing, China. Tel.: +86 010 689 116 31; E-mail:
gstwliping@126.com
Abstract: MEMS piezoelectric energy harvester is optimally designed and
fabricated, and its vibration characteristics, output voltage, power, power
spectral density (SD) and frequency response function under harmonic and random
excitation is studied by theory analysis, simulation and experimental test. For
the designed MEMS piezoelectric energy harvester, the accurate solutions and
expressions of amplitude, voltage, power and power spectral density are
derived. Then, vibration characteristic, voltage, power and power SD with
different load resistance, sinusoidal acceleration and random acceleration SD
are simulated and tested; moreover, frequency response function of MEMS
piezoelectric energy harvester is obtained by experimental test, and the
results are consistent with theoretical model. When sinusoidal acceleration is
0.6 g, the maximal amplitude of mass is 116 μm and the
power density is 0.1 mW/cm^{3}. By testing results, output
voltage of piezoelectric energy harvester is proportional to the amplitude, and
the amplitude at optimal load is smaller than of at open circuit because of the
feedback effect of load resistance. In addition, output power SD linearly
increases with acceleration SD increasing. When acceleration SD is 5
× 10^{-4} (m/s^{2})^{2}/Hz,
power SD is 1.24 μW^{2}/Hz.
Keywords: MEMS energy harvester, amplitude, random excitation, frequency response function
