Affiliations: [a] Department of Mechanical Engineering, Yamaguchi
University, 2-16-1 Tokiwadai, Ube, 755-8611 Yamaguchi, Japan | [b] Tohoku University, Japan | [c] Asahi Diamond Industrial Co. Ld., Japan
Correspondence:
[*]
Corresponding author: Prof. Zhongwei Jiang; Department of
Mechanical Engineering, Yamaguchi University, Japan. Fax: +81 836 85 9137;
E-mail: jiang@po.cc.yamaguchi-u.ac.jp
Abstract: This work is concerned with an experimental study on online
measurement of the states of ID saw blade cutting a 12-inch crystal ingot. An
online monitoring system consisting of a 3-axis piezoelectric sensor, a
three-band digital filter, a digital oscilloscope and computer was developed.
Since the acoustical and chatter vibration signals during cutting ingot were
complex, they are decomposed in three frequency regions to evaluate the blade
extension circumstance, the sharpness of blade edge and the interference
between blade and ingot. The proposed ID-Blade slicer monitoring system is
validated for evaluation of the blade slicing 12-inch silicon ingots.
Keywords: ID saw blade, 12inch wafer slicer, online monitoring system
